DVD # 1

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Microelectronics Failure Analysis

DVD 1


Lecture 1

"Introduction to Failure Analysis"

Presenter: Rich Anderson

Sandia Labs

In Lecture 1 Rich presents an introduction to Failure Analysis and also highlights the topics to be covered in the course. This lecture is a good overview of the FA process.

  • Introduce the general concept of FA
  • Describe the role of FA in the IC industry
  • Show examples of the FA process
  • Microelectronics challenges for FA
  • Describe the content of this course
  • Provide resources for more information

Included with this lecture, you will receive 40 presentation slides in PDF format. Lecture time is approximately 75 minutes.

Click here for a sample video of the presentation. The size and quality of the video have been reduced for playing on the web.


Lecture 2

"Basic Failure Analysis Techniques I"

Presenter: Chris Henderson

Semitracks Inc.

In lecture 2 Chrisbegins laying out the process of FA. As his explanation unfolds he introduces many terms and concepts that will be built upon later in the course. Chris is very good at presenting complex topics in clear and simple terms, yet he manages to include many details in the process.

Some of the issues covered are: Fault Isolation, Deprocessing, Inspection (PEM, liquid crystal, wet etch, dry etch, optical, SEM, microprobing, and FIB).

Topics:

  • Motivation for FA
  • Basic Philosophical Principles
  • Practical Principles
  • Process Flow Diagrams

Included with lectures 2 and 3, you will receive 95 presentation slides in PDF format. Lecture time is approximately 75 minutes per lecture.

Click here for a sample video of the presentation. The size and quality of the video have been reduced for playing on the web.


Lecture 3

"Basic Failure Analysis Techniques II"

Presenter: Chris Henderson

Semitracks Inc.

Lecture 3 continues with the topics listed below.

Topics:

  • Fault Localization / Fault Isolation
  • Microlocalization Techniques
  • Analytical Characterization
  • Fault/Defect Isolation Techniques
  • FA Tools:Electron Beam, Ion Beam, Thermal Detection
  • Infrared Imaging
  • Light Emission Microscopy
  • “Hot Spot” Analysis
  • Charge-Induced Voltage Alteration
  • CIVA Imaging
  • And Lots More...

Included with lectures 2 and 3, you will receive 95 presentation slides in PDF format. Lecture time is approximately 75 minutes per lecture.

Click here for a sample video of the presentation. The size and quality of the video have been reduced for playing on the web.

 
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Last modified: 09/04/08