Microelectronics Failure Analysis

DVD 9

Lecture 25

"Failure Analysis in High Volume Manufacturing"

Presenter: Kathy Clark

Lecture 25 - Kathy shares the experience gained working as a senior engineer at Intel in Yield Engineering and Failure Analysis. Her lecture focuses on FAs contribution in a High Volume Manufacturing (HVM) Fab environment.

Topics:

• Factory indicators
• Role of FA engineer
• Types of yield problems: Parametric, Systematic, Random
• Yield Engineering Examples
• Typical HVM FA Lab
• Failure Analysis Flow Chart
• Typical failure analysis plan

Included with this lecture, you will receive 32 presentation slides in PDF format. Lecture time is approximately 75 minutes.

Lecture 26

"Integrated Circuit Debug and Validation"

Presenter: Professor Lawrence Clark

UNM

In Lecture 26 Professor Clark describes integrated circuit debug, validation, and characterization including Methodologies, Tools and some interesting anecdotal experiences.

Topics:

• Debug - Methods and Tools
• Pre/Post- Silicon Logic Validation
• Methodologies - Planning for Problems
• Methodologies - Navigation
• Tools: Tester - Shmoo Plots / IV Measurements
• Infra-red Emission Microscopy (IREM)
• SEM Contrasting
• Laser Voltage Probe (LVP)
• Time Resolved Emission (TRE)
• Testing Fixes
• Focused Ion Beam (FIB)
• Experiences - Debug can be FUN!

Included with this lecture, you will receive 32 presentation slides in PDF format. Lecture time is approximately 75 minutes.

Lecture 27

"Elemental Analysis for FA"

Presenter: Paul Kotula

Sandia Labs

Lecture 27 - Paul begins by addressing the motivation behind elemental analyses and explains various types of chemical analysis. He then moves onto the details of various types of spectroscopy. This lecture is very well presented and supported with a variety of excellent photographs.

Topics:

• X-ray spectroscopy
• X-rays (SEM-EDXS, STEM-EDXS, XRF)
• Electron spectroscopy
• Auger electron spectroscopy (AES)
• X-ray photoelectron spectroscopy (XPS)
• Energy-loss electrons (STEM-EELS)
• Mass spectroscopy (SIMS, TOF-SIMS)
• FA example analyses and State-of-the-art techniques

Included with this lecture, you will receive 57 presentation slides in PDF format. Lecture time is approximately 75 minutes.

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