Wafer Fab Processing Notes
This intensive 4-day course offers a comprehensive examination of the wafer fab processes used to manufacture state-of-the-art microchips. Topics include semiconductor devices and ICs, silicon crystal growth and crystal defects, ion implantation, thermal processing, contamination control, wafer cleaning, LPCVD, PECVD, PVD, CMP, microlithography, etch, multilevel interconnect technology, and manufacturing technology. Process integration will be illustrated using a basic CMOS process flow.
The course is designed primarily for process engineers and process technicians. The emphasis is on understanding how each individual process step works, and understanding the key process control variables for each step. The functional design of the process tools is also discussed, as are process characterization, monitoring, and control.
Engineers new to semiconductor manufacturing will gain a solid, broad understanding of the entire wafer fab process. Engineers experienced in one or more functional areas of wafer fab will benefit from a thorough understanding of processes in other areas, as well as a better appreciation of process interactions.
|Wafer Fab Processing Course Notes||$100|
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