EBIC Figures

Amplification configuration for EBIC.




EBIC image showing location of a gate oxide defect on IC. (photo coutresy Analytical Solutions).




EBIC image (noisy) showing location of a gate oxide defect on a different IC. (photo coutresy Analytical Solutions).




EBIC image showing location of ESD damage on a bipolar transistor on an IC. (photo coutresy DM Data).




EBIC image showing the use of EBIC for outlining diffusion regions on an IC. (photo coutresy Analytical Solutions).




EBIC can also be used to help delineate cross sectional information. Here EBIC is used to identify the depth of implants and diffused junctions. (photo coutresy DM Data).




EBIC image showing location of electrical overstress damage in an output transistor on a bipolar IC. (photo coutresy Analytical Solutions).




Noisy EBIC image showing location of a gate oxide defect on a CMOS IC. (photo coutresy Analytical Solutions).




EBIC image showing ESD damage on the lower transistor: emitter-base short. (photo coutresy Analytical Solutions).




EBIC image showing subtle ESD damage on the upper right hand corner of the emitter-base junction. (photo coutresy DM Data).




EBIC image showing location of a gate oxide defect after strip back to poly on a 3 level metal submicron IC. (photo courtesy Sandia Labs).




EBIC image of an entire die produced by choosing VDD and VSS as the two signal points. (photo courtesy Sandia Labs).