Secondary Ion Mass Spectrometry Figures

Depth profile for triple level metal process (Courtesy IBM Analytical Services).




Depth profile for triple level metal process (Courtesy IBM Analytical Services).




Depth profile for triple level metal process (Courtesy IBM Analytical Services).




Plot of contamination (Courtesy IBM Analytical Services).




Plot of contamination (Courtesy IBM Analytical Services).




Depth profile for a halo implant in a p+ diode structure (Courtesy Sandia Labs).




Depth profile for a halo implant in a n+ diode structure (Courtesy Sandia Labs).