Secondary Ion Mass Spectrometry Figures
Figure 1
Depth profile for triple level metal process (Courtesy IBM Analytical Services).
Figure 2
Depth profile for triple level metal process (Courtesy IBM Analytical Services).
Figure 3
Depth profile for triple level metal process (Courtesy IBM Analytical Services).
Figure 4
Plot of contamination (Courtesy IBM Analytical Services).
Figure 5
Plot of contamination (Courtesy IBM Analytical Services).
Figure 6
Depth profile for a halo implant in a p+ diode structure (Courtesy Sandia Labs).
Figure 7
Depth profile for a halo implant in a n+ diode structure (Courtesy Sandia Labs).
